Ŭ α׷ ѱ Ŵ

        ( Ʒ ׸ 콺 Ͻø ش Ǽ Upgrade ׸񺰷 ÷ ǰ ٶ,,, )

 

         1. α׷

         2. ⺻ ( Basic )

         3. ( Data) ϱ

         4. Reverse Engineering

         5. Display Setup/Lock /Formula

         6. Plot/Color          6.1 Plot

         7. Error Tools

              7.1 Estimated Yield

              7.2 Yield estimator

         8. ٸ Ͽ ִ Data Ȱϱ  پ ȭ ٹ̱ &  μ

         9. Materials

           9.1 Spectrometer / Ellipsometer data Ȱ ϱ

           9.2 JOB ( PC ִ PC ȯ ϴ )

         10. ( )

         11. () ̿Ͽ

         12. Stress, Strain, Temperature and Uniformity Tools, Packing Density.

         13. Interpolation & Smoothing of Materials Data ( data ٵ)

         14. Multicoating(Stack)

         15. ȭ ( Refinements and Synthesis)

         16. پ ()

            16.1 IT Filter ( ߰ 1)

         17. Analysis Tools ( Design )

         18. Function ( Script ̿ پ )

            18-1. Fringes ( Layer β Ի簢 ܰ躰 ϱ )

            18-2. OLED

            18-3. Ի簢 ȭ /ݻ

         19. Program Upgrade Upgrade History ( ֽ )

         vStack(Stack)/Runsheet/Simulator/Function/DWDM ش ư Ŭ ϸ ֽϴ.